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Vacuum Spin Coater SOP

DIY Vacuum Spin Coater Hooked up to Rotary Vane Pump

Purpose

To apply a thin layer of wet chemicals to the surface of the chip, with sub-micron control.

Troubleshooting and Best Practices

Spin Coater is Stuck, the chuck tries to move but it stays in place
  1. Remove the outer plastic vase that holds the residual photoresist and chemicals
  2. Wet a cleanroom wipe with acetone and wipe the outside of the chuck and the inside of the plastic vase clean
  3. Attempt to run the spin coater again
  4. If the problem persists, run the spin coater without the plastic vase or any chip present, then press the acetone covered wipe against the chuck as it is spinning to get a thorough clean

Procedure

  1. Plug in the Spin coater and the vacuum pump (if either is not able to power on try hitting “reset” on the outlet)
  2. Use the arrows on the touch screen to set the spin time and rpm
  3. Use tweezers to place wafer onto the o-ring so that the chip completely covers the o-ring and will seal onto it
    1. Also attempt to center the chip on the o-ring as best you can. This will minimize the chances of it flying off.
  4. Use a pipette to apply liquid on top of the wafer while it is seated in the spin coater. You only need a couple drops in the pipette, don't suck up extra.
  5. Close the HMDS/photoresist/SOG lid.
  6. Close the spin coater lid
  7. SWITCH ON THE VACUUM PUMP!
  8. Press “begin”
    1. This will begin a pre spin at 600 rpm
  9. Press “coat”
  10. When the spin time has been reached, the coater will automatically ramp down to rest
  11. Open the lid and remove the wafer with tweezers

Side Notes

If you hear the spin coater constantly beeping, this is normal. It does this because we are using a drone motor ESC, so it is programmed to make a noise after being at rest for a few minutes. It’s trying to help you find it 🙂

Feel free to turn it off using the switch in the front so the noise goes away.